Device for fast and low-loss replacement of laser output mirror

快速低损耗更换激光输出镜的装置

Abstract

快速低损耗更换激光输出镜的装置涉及高功率气体激光器领域,该装置包括腔阀、输出镜安装软管座、第一管路、第二管路和压力传感器;腔阀密封安装在激光器工作腔上,腔阀的通道孔径大于等于激光器工作腔上的通光孔径,且通道孔与通光孔同轴安装;输出镜安装软管座的一端法兰密封同轴安装在腔阀上,另一端法兰通过激光器的镜片压盖与激光输出镜密封连接;输出镜安装软管座的法兰上开有与外界相通的孔,第一管路、第二管路和压力传感器分别与输出镜安装软管座法兰上所开的孔密封连接;第一管路和第二管路上分别安装有管阀。本发明可以大大缩短激光输出镜的更换时间,且对激光器工作气体的浪费极小。
The invention discloses a device for fast and low-loss replacement of a laser output mirror, relating to the field of high-power gas laser devices. The device comprises a cavity valve, an output mirror mounting flexible pipe seat, a first pipeline, a second pipeline and a pressure sensor, wherein the cavity valve is hermetically mounted on a working cavity of the laser device, the aperture of a channel of the cavity valve is not less than the clear aperture on the working cavity of the laser device, and a channel hole and a light through hole are coaxially mounted; a flange at one end of the output mirror mounting flexible pipe seat is hermetically and coaxially mounted on the cavity valve, and a flange at the other end is hermetically connected with the laser output mirror through a lens gland bush of the laser device; holes communicated with the outside are formed in the flanges of the output mirror mounting flexible pipe seat, and the first pipeline, the second pipeline and the pressure sensor are respectively hermetically connected with the holes formed in the flanges of the output mirror mounting flexible pipe seat; and pipe valves are respectively mounted on the first pipeline and the second pipeline. The device disclosed by the invention can greatly shorten the replacement time of the laser output mirror and realize very small waste of working gas of the laser device.

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Patent Citations (1)

    Publication numberPublication dateAssigneeTitle
    CN-1494185-AMay 05, 2004中国科学院上海光学精密机械研究所具有隔离阀门的气体激光器

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    CN-103259161-BJuly 23, 2014山东科技大学Cyclic air-exhausting method for obtaining high-purity terahertz working substance and optical maser
    CN-104535985-AApril 22, 2015无锡中科光电技术有限公司用于激光雷达的透过装置